CAS: 4098-98-0 Molecular Formula: C12H36Si5 Molecular Weight (g/mol): 320.85 MDL Number: MFCD00054859 InChI Key: BOJSDHZZKKYWAS-UHFFFAOYSA-N Synonym: tetrakis trimethylsilyl silane,1,1,1,3,3,3-hexamethyl-2,2-bis trimethylsilyl trisilane,tetrakil trimethylsilyl silane,si si ch3 3 4,trisilane, 1,1,1,3,3,3-hexamethyl-2,2-bis trimethylsilyl,2,2-bis trimethylsilyl-1,1,1,3,3,3-hexamethyl-trisilane,acmc-1an6g,tetra trimethylsilyl-silane,bojsdhzzkkywas-uhfffaoysa PubChem CID: 138115 IUPAC Name: tetrakis(trimethylsilyl)silane SMILES: C[Si](C)(C)[Si]([Si](C)(C)C)([Si](C)(C)C)[Si](C)(C)C